Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001193125-22-037072-index-headers.html | 2022-02-11 16:17:08 | |
| 0001193125-22-037072-index.html | 2022-02-11 16:17:08 | |
| 0001193125-22-037072.txt | 2022-02-11 16:17:08 | |
 0001193125-22-037072-xbrl.zip | 16145 | 2022-02-11 16:17:08 |
| d311326d8k.htm | 25506 | 2022-02-11 16:17:08 |
| d311326d8k_htm.xml | 3375 | 2022-02-11 16:17:08 |
| d311326dex101.htm | 34297 | 2022-02-11 16:17:08 |
| FilingSummary.xml | 1734 | 2022-02-11 16:17:08 |
| Financial_Report.xlsx | 5682 | 2022-02-11 16:17:08 |
| MetaLinks.json | 18294 | 2022-02-11 16:17:08 |
| mksi-20220207.xsd | 2857 | 2022-02-11 16:17:08 |
| mksi-20220207_lab.xml | 17995 | 2022-02-11 16:17:08 |
| mksi-20220207_pre.xml | 11262 | 2022-02-11 16:17:08 |
| R1.htm | 40109 | 2022-02-11 16:17:08 |
| report.css | 2767 | 2022-02-11 16:17:08 |
| Show.js | 1084 | 2022-02-11 16:17:08 |