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| 0001193125-13-207610.txt | 2013-05-08 16:32:56 | |
 0001193125-13-207610-xbrl.zip | 138763 | 2013-05-08 16:32:56 |
| d508765d10q.htm | 701207 | 2013-05-08 16:32:56 |
| d508765dex311.htm | 10624 | 2013-05-08 16:32:56 |
| d508765dex312.htm | 10651 | 2013-05-08 16:32:56 |
| d508765dex321.htm | 5902 | 2013-05-08 16:32:56 |
| FilingSummary.xml | 39258 | 2013-05-08 16:32:56 |
| Financial_Report.xls | 1074390 | 2013-05-08 16:32:56 |
| mksi-20130331.xml | 1339095 | 2013-05-08 16:32:56 |
| mksi-20130331.xsd | 58763 | 2013-05-08 16:32:56 |
| mksi-20130331_cal.xml | 91792 | 2013-05-08 16:32:56 |
| mksi-20130331_def.xml | 147303 | 2013-05-08 16:32:56 |
| mksi-20130331_lab.xml | 406070 | 2013-05-08 16:32:56 |
| mksi-20130331_pre.xml | 310027 | 2013-05-08 16:32:56 |
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| report.css | 2721 | 2013-05-08 16:32:56 |
| Show.js | 6423 | 2013-05-08 16:32:56 |