Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0000950170-23-004673-index-headers.html | 2023-02-27 16:31:51 | |
| 0000950170-23-004673-index.html | 2023-02-27 16:31:51 | |
| 0000950170-23-004673.txt | 2023-02-27 16:31:51 | |
 0000950170-23-004673-xbrl.zip | 40278 | 2023-02-27 16:31:51 |
| FilingSummary.xml | 1737 | 2023-02-27 16:31:51 |
| Financial_Report.xlsx | 5768 | 2023-02-27 16:31:51 |
 img23390321_0.jpg | 2110 | 2023-02-27 16:31:51 |
| MetaLinks.json | 18575 | 2023-02-27 16:31:51 |
| mksi-20230227.htm | 51607 | 2023-02-27 16:31:51 |
| mksi-20230227.xsd | 2466 | 2023-02-27 16:31:51 |
| mksi-20230227_htm.xml | 4912 | 2023-02-27 16:31:51 |
| mksi-20230227_lab.xml | 14028 | 2023-02-27 16:31:51 |
| mksi-20230227_pre.xml | 10288 | 2023-02-27 16:31:51 |
| mksi-ex99_1.htm | 1404554 | 2023-02-27 16:31:51 |
| R1.htm | 41223 | 2023-02-27 16:31:51 |
| report.css | 2767 | 2023-02-27 16:31:51 |
| Show.js | 1085 | 2023-02-27 16:31:51 |