Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0000950170-22-021321-index-headers.html | 2022-11-02 17:20:56 | |
| 0000950170-22-021321-index.html | 2022-11-02 17:20:56 | |
| 0000950170-22-021321.txt | 2022-11-02 17:20:56 | |
 0000950170-22-021321-xbrl.zip | 48976 | 2022-11-02 17:20:56 |
| FilingSummary.xml | 1739 | 2022-11-02 17:20:56 |
| Financial_Report.xlsx | 5769 | 2022-11-02 17:20:56 |
 img23390321_0.jpg | 2110 | 2022-11-02 17:20:56 |
| MetaLinks.json | 18043 | 2022-11-02 17:20:56 |
| mksi-20221102.htm | 53174 | 2022-11-02 17:20:56 |
| mksi-20221102.xsd | 2466 | 2022-11-02 17:20:56 |
| mksi-20221102_htm.xml | 4912 | 2022-11-02 17:20:56 |
| mksi-20221102_lab.xml | 14028 | 2022-11-02 17:20:56 |
| mksi-20221102_pre.xml | 10288 | 2022-11-02 17:20:56 |
| mksi-ex99_1.htm | 2090246 | 2022-11-02 17:20:56 |
| R1.htm | 41226 | 2022-11-02 17:20:56 |
| report.css | 2767 | 2022-11-02 17:20:56 |
| Show.js | 1085 | 2022-11-02 17:20:56 |