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| 0000950123-11-095281-index.html | 2011-11-04 15:12:24 | |
| 0000950123-11-095281.txt | 2011-11-04 15:12:24 | |
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| b87815exv31w1.htm | 8009 | 2011-11-04 15:12:24 |
| b87815exv31w2.htm | 8299 | 2011-11-04 15:12:24 |
| b87815exv32w1.htm | 4161 | 2011-11-04 15:12:24 |
| FilingSummary.xml | 24546 | 2011-11-04 15:12:24 |
| Financial_Report.xls | 584685 | 2011-11-04 15:12:24 |
| mksi-20110930.xml | 703114 | 2011-11-04 15:12:24 |
| mksi-20110930.xsd | 36157 | 2011-11-04 15:12:24 |
| mksi-20110930_cal.xml | 71047 | 2011-11-04 15:12:24 |
| mksi-20110930_def.xml | 104319 | 2011-11-04 15:12:24 |
| mksi-20110930_lab.xml | 322787 | 2011-11-04 15:12:24 |
| mksi-20110930_pre.xml | 236322 | 2011-11-04 15:12:24 |
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| report.css | 2721 | 2011-11-04 15:12:24 |
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