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|---|---|---|
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| 0001104659-26-007486-index.html | 2026-01-28 17:18:58 | |
| 0001104659-26-007486.txt | 2026-01-28 17:18:58 | |
 0001104659-26-007486-xbrl.zip | 25842 | 2026-01-28 17:18:58 |
| FilingSummary.xml | 1632 | 2026-01-28 17:18:58 |
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| R1.htm | 38064 | 2026-01-28 17:18:58 |
| report.css | 2766 | 2026-01-28 17:18:58 |
| Show.js | 1084 | 2026-01-28 17:18:58 |
| tm264365d1_8k.htm | 143835 | 2026-01-28 17:18:58 |
| tm264365d1_8k_htm.xml | 3086 | 2026-01-28 17:18:58 |
| veco-20260128.xsd | 3005 | 2026-01-28 17:18:58 |
| veco-20260128_lab.xml | 34239 | 2026-01-28 17:18:58 |
| veco-20260128_pre.xml | 22352 | 2026-01-28 17:18:58 |