Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-25-060323-index-headers.html | 2025-06-17 17:16:59 | |
| 0001104659-25-060323-index.html | 2025-06-17 17:16:59 | |
| 0001104659-25-060323.txt | 2025-06-17 17:16:59 | |
 0001104659-25-060323-xbrl.zip | 176192 | 2025-06-17 17:16:59 |
| FilingSummary.xml | 1635 | 2025-06-17 17:16:59 |
| MetaLinks.json | 39119 | 2025-06-17 17:16:59 |
| R1.htm | 38061 | 2025-06-17 17:16:59 |
| report.css | 2767 | 2025-06-17 17:16:59 |
| Show.js | 1084 | 2025-06-17 17:16:59 |
| tm2518130d1_8k.htm | 28194 | 2025-06-17 17:16:59 |
| tm2518130d1_8k_htm.xml | 3555 | 2025-06-17 17:16:59 |
| tm2518130d1_ex10-1.htm | 1097189 | 2025-06-17 17:16:59 |
 tm2518130d1_ex10-1img001.jpg | 4778 | 2025-06-17 17:16:59 |
| veco-20250616.xsd | 3005 | 2025-06-17 17:16:59 |
| veco-20250616_lab.xml | 34239 | 2025-06-17 17:16:59 |
| veco-20250616_pre.xml | 22352 | 2025-06-17 17:16:59 |