Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-25-052024-index-headers.html | 2025-05-22 16:46:10 | |
| 0001104659-25-052024-index.html | 2025-05-22 16:46:10 | |
| 0001104659-25-052024.txt | 2025-05-22 16:46:10 | |
 0001104659-25-052024-xbrl.zip | 2950 | 2025-05-22 16:46:10 |
| FilingSummary.xml | 2597 | 2025-05-22 16:46:10 |
 lg_veeco-4c.jpg | 23287 | 2025-05-22 16:46:10 |
| MetaLinks.json | 62856 | 2025-05-22 16:46:10 |
| R1.htm | 9488 | 2025-05-22 16:46:10 |
| R2.htm | 16415 | 2025-05-22 16:46:10 |
| R3.htm | 9310 | 2025-05-22 16:46:10 |
| report.css | 2767 | 2025-05-22 16:46:10 |
| Show.js | 1085 | 2025-05-22 16:46:10 |
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| tm2515568d1_ex-filingfees.htm | 19900 | 2025-05-22 16:46:10 |
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