Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-20-041166-index-headers.html | 2020-03-31 16:15:43 | |
| 0001104659-20-041166-index.html | 2020-03-31 16:15:43 | |
| 0001104659-20-041166.txt | 2020-03-31 16:15:43 | |
 0001104659-20-041166-xbrl.zip | 12975 | 2020-03-31 16:15:43 |
| FilingSummary.xml | 1637 | 2020-03-31 16:15:43 |
| Financial_Report.xlsx | 5776 | 2020-03-31 16:15:43 |
 image_001.jpg | 5187 | 2020-03-31 16:15:43 |
| MetaLinks.json | 38504 | 2020-03-31 16:15:43 |
| R1.htm | 38595 | 2020-03-31 16:15:43 |
| report.css | 2766 | 2020-03-31 16:15:43 |
| Show.js | 1085 | 2020-03-31 16:15:43 |
| tm2014360d1_8k.htm | 24659 | 2020-03-31 16:15:43 |
| tm2014360d1_8k_htm.xml | 3485 | 2020-03-31 16:15:43 |
| tm2014360d1_ex99-1.htm | 7136 | 2020-03-31 16:15:43 |
| veco-20200331.xsd | 3177 | 2020-03-31 16:15:43 |
| veco-20200331_lab.xml | 34591 | 2020-03-31 16:15:43 |
| veco-20200331_pre.xml | 22704 | 2020-03-31 16:15:43 |