Form PRE 14A - Other preliminary proxy statements:
SEC Accession No. 0000950149-03-000511
Filing Date
2003-03-07
Accepted
2003-03-07 15:07:39
Documents
1
Period of Report
2003-04-30

Document Format Files

Seq Description Document Type Size
1 PRELIMINARY PROXY STATEMENT f88327pre14a.txt PRE 14A 53616
  Complete submission text file 0000950149-03-000511.txt   55155
Mailing Address 2201 S MCDOWELL BLVD PO BOX 6020 PETALUMA CA 94955
Business Address 2201 S MCDOWELL BLVD PO BOX 6020 PETALUMA CA 94955 7077635600
TEGAL CORP /DE/ (Filer) CIK: 0000931059 (see all company filings)

EIN.: 680370244 | State of Incorp.: DE | Fiscal Year End: 0331
Type: PRE 14A | Act: 34 | File No.: 000-26824 | Film No.: 03596189
SIC: 3559 Special Industry Machinery, NEC