Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001242750-05-000001
Filing Date
2005-05-26
Accepted
2005-05-26 12:21:28
Documents
1
Period of Report
2005-05-25

Document Format Files

Seq Description Document Type Size
1 PRIMARY DOCUMENT edgardoc.html 4  
1 PRIMARY DOCUMENT edgardoc.xml 4 5574
  Complete submission text file 0001242750-05-000001.txt   7246
Mailing Address
Business Address 2800 BAYVIEW DR FREMONT CA 94538 5106575900
MATTSON TECHNOLOGY INC (Issuer) CIK: 0000928421 (see all company filings)

EIN.: 770208119 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 47957 AVALON HEIGHTS TERR FREMONT CA 94539
Business Address 4089825818
BETZ HANS GEORG DR (Reporting) CIK: 0001242750 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-24838 | Film No.: 05858908