Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001241453-06-000001
Filing Date
2006-02-09
Accepted
2006-02-09 14:26:03
Documents
1
Period of Report
2006-02-07

Document Format Files

Seq Description Document Type Size
1 PRIMARY DOCUMENT edgardoc.html 4  
1 PRIMARY DOCUMENT edgardoc.xml 4 8271
  Complete submission text file 0001241453-06-000001.txt   10043
Mailing Address 47131 BAYSIDE PARKWAY FREMONT CA 94538
Business Address 47131 BAYSIDE PARKWAY FREMONT CA 94538 510 657 5900
MATTSON TECHNOLOGY INC (Issuer) CIK: 0000928421 (see all company filings)

EIN.: 770208119 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 47131 BAYSIDE DRIVE FREMONT CA 94538
Business Address 5104925954
VIEFHUES LUDGER H (Reporting) CIK: 0001241453 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-24838 | Film No.: 06592389