<SEC-DOCUMENT>0000928421-14-000085-index.html : 20140623
<SEC-HEADER>0000928421-14-000085.hdr.sgml : 20140623
<ACCEPTANCE-DATETIME>20140602124030
ACCESSION NUMBER:		0000928421-14-000085
CONFORMED SUBMISSION TYPE:	SD
PUBLIC DOCUMENT COUNT:		3
<RULE>
<RULE-NAME>13p-1
<ITEM>
<ITEM-NUMBER>1.01
<ITEM-PERIOD>20131231
</ITEM>
</RULE>
FILED AS OF DATE:		20140602
DATE AS OF CHANGE:		20140602

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MATTSON TECHNOLOGY INC
		CENTRAL INDEX KEY:			0000928421
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				770208119
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SD
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-24838
		FILM NUMBER:		14883154

	BUSINESS ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
		BUSINESS PHONE:		510 657 5900

	MAIL ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
</SEC-HEADER>
<DOCUMENT>
<TYPE>SD
<SEQUENCE>1
<FILENAME>formsd.htm
<DESCRIPTION>SD
<TEXT>
Document 1 - file: formsd.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-1.01
<SEQUENCE>2
<FILENAME>exhibit.htm
<DESCRIPTION>EXHIBIT
<TEXT>
Document 2 - file: exhibit.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>mattsonlogo.jpg
<TEXT>
Document 3 - file: mattsonlogo.jpg

</DOCUMENT>
</SEC-DOCUMENT>