UNITED STATES

SECURITIES AND EXCHANGE COMMISSION

Washington, D.C. 20549

FORM SD

Specialized Disclosure Report

MATTSON TECHNOLOGY, INC.

(Exact name of Registrant as Specified in its Charter)

Delaware	000-24838	77-0208119
(State or Other Jurisdiction of Incorporation or Organization)	(Commission File Number)	(I.R.S. Employer Identification Number)

47131 Bayside Parkway

Fremont, California    94538

(Address of principal executive offices)

J. Michael Dodson

(510) 657-5900

(Name and telephone number, including area code, of the person to contact in connection with this report.)

Check the appropriate box to indicate the rule pursuant to which this form is being filed, and provide the period to which the information in this form applies:

[X] Rule 13p-1 under the Securities Exchange Act (17 CFR 240.13p-1) for the reporting period from January 1 to December 31, 2013

Section 1 – Conflict Minerals Disclosure

Item 1.01 Conflict Minerals Disclosure and Report

Mattson Technology, Inc. has filed a Conflict Minerals Report as Exhibit 1.01 hereto and is publicly available at http://www.mattson.com

Item 1.02 Exhibits

A copy of Mattson Technology, Inc.’s Conflict Minerals Report is provided as Exhibit 1.01 hereto.

Section 2 – Exhibits

Item 2.01 Exhibits

Exhibit 1.01 – Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form.

SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on behalf by the duly authorized undersigned.

MATTSON TECHNOLOGY, INC.

(Registrant)

/s/ J. Michael Dodson        

By J. Michael Dodson, Chief Operating Officer, Chief Financial Officer, Executive Vice President and Secretary

Date: June 2, 2014