Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000928421-14-000029
Filing Date
2014-03-17
Accepted
2014-03-17 17:29:42
Documents
14
Period of Report
2013-12-31

Document Format Files

Seq Description Document Type Size
1 10-K mtsn201310k.htm 10-K 1904385
2 EXHIBIT mtsn20131231-ex211.htm EX-21.1 4289
3 EXHIBIT mtsn20131231-ex231.htm EX-23.1 3303
4 EXHIBIT mtsn20131231-ex311.htm EX-31.1 12212
5 EXHIBIT mtsn20121331-ex312.htm EX-31.2 12362
6 EXHIBIT mtsn20131231-ex321.htm EX-32.1 8069
13 mtsn201310kchart.jpg GRAPHIC 164315
14 prlogoa01a01a01.jpg GRAPHIC 15912
  Complete submission text file 0000928421-14-000029.txt   12168512

Data Files

Seq Description Document Type Size
7 XBRL INSTANCE DOCUMENT mtsn-20131231.xml EX-101.INS 1882020
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT mtsn-20131231.xsd EX-101.SCH 65276
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT mtsn-20131231_cal.xml EX-101.CAL 100963
10 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT mtsn-20131231_def.xml EX-101.DEF 383426
11 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT mtsn-20131231_lab.xml EX-101.LAB 892980
12 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT mtsn-20131231_pre.xml EX-101.PRE 528132
Mailing Address 47131 BAYSIDE PARKWAY FREMONT CA 94538
Business Address 47131 BAYSIDE PARKWAY FREMONT CA 94538 510 657 5900
MATTSON TECHNOLOGY INC (Filer) CIK: 0000928421 (see all company filings)

EIN.: 770208119 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-24838 | Film No.: 14698623
SIC: 3559 Special Industry Machinery, NEC