Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0000924355-02-000086
Filing Date
2002-02-15
Accepted
2002-02-15 00:00:00
Documents
1

Document Format Files

Seq Description Document Type Size
1 THERMA WAVE INC. YEAR END 13G 2001 twav13g.htm SC 13G 17412
  Complete submission text file 0000924355-02-000086.txt   19345
Mailing Address 1250 RELIANCE WAY FREMONT CA 94539
Business Address 1250 RELIANCE WAY FREMONT CA 94539 5104903663
THERMA WAVE INC (Subject) CIK: 0000828119 (see all company filings)

EIN.: 943000561 | State of Incorp.: DE | Fiscal Year End: 0331
Type: SC 13G | Act: 34 | File No.: 005-60517 | Film No.: 02551175
SIC: 3823 Industrial Instruments For Measurement, Display, and Control

Mailing Address ONE FINANCIAL CENTER BOSTON MA 02111
Business Address ONE FINANCIAL CENTER BOSTON MA 02111 6173571399
STATE STREET RESEARCH & MANAGEMENT CO //MA/ (Filed by) CIK: 0000924355 (see all company filings)

EIN.: 133142135 | State of Incorp.: DE | Fiscal Year End: 1231