Form SCHEDULE 13G/A - Statement of Beneficial Ownership by Certain Investors: [Amend]
SEC Accession No. 0000906304-25-000018
Filing Date
2025-01-28
Accepted
2025-01-28 09:55:34
Documents
1

Document Format Files

Seq Description Document Type Size
1 primary_doc.html SCHEDULE 13G/A  
1 primary_doc.xml SCHEDULE 13G/A 8364
  Complete submission text file 0000906304-25-000018.txt   10377
Mailing Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288
Business Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Subject) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: SCHEDULE 13G/A | Act: 34 | File No.: 005-39482 | Film No.: 25561556
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)

Mailing Address 745 FIFTH AVENUE NEW YORK NY 10151
Business Address 745 FIFTH AVENUE NEW YORK NY 10151 212-508-4500
ROYCE & ASSOCIATES LP (Filed by) CIK: 0000906304 (see all company filings)

EIN.: 522343049 | State of Incorp.: DE | Fiscal Year End: 0331
Type: SCHEDULE 13G/A