Form SC 13G/A - Statement of Beneficial Ownership by Certain Investors: [Amend]
SEC Accession No. 0000902219-03-001021
Filing Date
2003-02-12
Accepted
2003-02-12 08:57:20
Documents
1

Document Format Files

Seq Description Document Type Size
1 utek2.txt SC 13G/A 8833
  Complete submission text file 0000902219-03-001021.txt   10873
Mailing Address 75 STATE STREET BOSTON MA 02109
Business Address 75 STATE STREET BOSTON MA 02109 6179515000
WELLINGTON MANAGEMENT CO LLP (Filed by) CIK: 0000902219 (see all company filings)

EIN.: 042683227 | State of Incorp.: MA | Fiscal Year End: 1231
SIC: 0000

Mailing Address 3050 ZANKER RD SAN JOSE CA 95134
Business Address 3050 ZANKER RD SAN JOSE CA 95134 4083218835
ULTRATECH STEPPER INC (Subject) CIK: 0000909791 (see all company filings)

EIN.: 943169580 | State of Incorp.: DE | Fiscal Year End: 1231
Type: SC 13G/A | Act: 34 | File No.: 005-45124 | Film No.: 03552408
SIC: 3559 Special Industry Machinery, NEC