Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0000846087-07-000003
Filing Date
2007-02-14
Accepted
2007-02-14 11:12:43
Documents
1

Document Format Files

Seq Description Document Type Size
1 SEC FILING sec_filing.htm SC 13G 17657
  Complete submission text file 0000846087-07-000003.txt   19608
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Subject) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: SC 13G | Act: 34 | File No.: 005-39482 | Film No.: 07615277
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 75 STATE ST BOSTON MA 02109
Business Address 75 STATE ST BOSTON MA 02109 6179515741
WELLINGTON TRUST COMPANY N A (Filed by) CIK: 0000846087 (see all company filings)

State of Incorp.: MA | Fiscal Year End: 1031
Type: SC 13G
SIC: 0000