Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0000927016-02-000244
Filing Date
2002-01-16
Accepted
2002-01-16 00:00:00
Documents
1

Document Format Files

Seq Description Document Type Size
1 SCHEUDLE 13G dsc13g.txt SC 13G 13769
  Complete submission text file 0000927016-02-000244.txt   15625
Mailing Address 1250 RELIANCE WAY FREMONT CA 94539
Business Address 1250 RELIANCE WAY FREMONT CA 94539 5104903663
THERMA WAVE INC (Subject) CIK: 0000828119 (see all company filings)

EIN.: 943000561 | State of Incorp.: DE | Fiscal Year End: 0331
Type: SC 13G | Act: 34 | File No.: 005-60517 | Film No.: 2510402
SIC: 3823 Industrial Instruments For Measurement, Display, and Control

Mailing Address ONE FINANCIAL CENTER BOSTON MA 02111
Business Address ONE FINANCIAL CENTER BOSTON MA 02111
WESTFIELD CAPITAL MANAGEMENT CO INC (Filed by) CIK: 0000857696 (see all company filings)

EIN.: 043042550