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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-22-001222
Filing Date
2022-02-14
Accepted
2022-02-14 16:41:29
Documents
68
Period of Report
2021-12-31

Document Format Files

Seq Description Document Type Size
1 10-Q asys-20211231.htm   iXBRL 10-Q 1776461
2 EX-31.1 asys-ex31_1.htm EX-31.1 21856
3 EX-31.2 asys-ex31_2.htm EX-31.2 20783
4 EX-32.1 asys-ex32_1.htm EX-32.1 13754
5 EX-32.2 asys-ex32_2.htm EX-32.2 13794
6 GRAPHIC img248662173_0.jpg GRAPHIC 45889
  Complete submission text file 0000950170-22-001222.txt   6650445

Data Files

Seq Description Document Type Size
7 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT asys-20211231_def.xml EX-101.DEF 115485
8 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT asys-20211231_cal.xml EX-101.CAL 58796
9 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT asys-20211231_pre.xml EX-101.PRE 268206
10 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT asys-20211231_lab.xml EX-101.LAB 369259
11 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT asys-20211231.xsd EX-101.SCH 43068
62 EXTRACTED XBRL INSTANCE DOCUMENT asys-20211231_htm.xml XML 1132553
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

IRS No.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 22633465
SIC: 3559 Special Industry Machinery, NEC