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Filing Detail
Form S-8 - Securities to be offered to employees in employee benefit plans:
SEC Accession No. 0000950147-03-000144
Filing Date
2003-02-11
Accepted
2003-02-11 16:50:48
Documents
4
Effectiveness Date
2003-02-11

Document Format Files

Seq Description Document Type Size
1 REGISTRATION STATEMENT OF AMTECH SYSTEMS, INC. e-9545.txt S-8 17333
3 1998 STOCK OPTION PLAN -- AS AMENDED 03/29/02 ex4.txt EX-4 35631
4 OPINION OF SQUIRE, SANDERS & DEMPSEY L.L.P. ex5.txt EX-5 1840
5 CONSENT OF KPMG LLP ex23-1.txt EX-23.1 818
  Complete submission text file 0000950147-03-000144.txt   57601
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

IRS No.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: S-8 | Act: 33 | File No.: 333-103101 | Film No.: 03550630
SIC: 3559 Special Industry Machinery, NEC