Form SC 13G/A - Statement of Beneficial Ownership by Certain Investors: [Amend]
SEC Accession No. 0000906304-23-000075
Filing Date
2023-02-07
Accepted
2023-02-07 13:16:57
Documents
1

Document Format Files

Seq Description Document Type Size
1 asys9.txt SC 13G/A 9165
  Complete submission text file 0000906304-23-000075.txt   10990
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Subject) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: SC 13G/A | Act: 34 | File No.: 005-39482 | Film No.: 23593921
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 745 FIFTH AVENUE NEW YORK NY 10151
Business Address 745 FIFTH AVENUE NEW YORK NY 10151 212-508-4500
ROYCE & ASSOCIATES LP (Filed by) CIK: 0000906304 (see all company filings)

EIN.: 522343049 | State of Incorp.: DE | Fiscal Year End: 0331
Type: SC 13G/A