Form SC 13G/A - Statement of Beneficial Ownership by Certain Investors: [Amend]
SEC Accession No. 0000906304-22-000001
Filing Date
2022-01-14
Accepted
2022-01-14 10:16:03
Documents
1

Document Format Files

Seq Description Document Type Size
1 asys7.txt SC 13G/A 9163
  Complete submission text file 0000906304-22-000001.txt   10988
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Subject) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: SC 13G/A | Act: 34 | File No.: 005-39482 | Film No.: 22530678
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 745 FIFTH AVENUE NEW YORK NY 10151
Business Address 745 FIFTH AVENUE NEW YORK NY 10151 212-508-4500
ROYCE & ASSOCIATES LP (Filed by) CIK: 0000906304 (see all company filings)

EIN.: 522343049 | State of Incorp.: DE | Fiscal Year End: 0331
Type: SC 13G/A