Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0000906304-15-000017
Filing Date
2015-01-05
Accepted
2015-01-05 13:05:22
Documents
1

Document Format Files

Seq Description Document Type Size
1 asys.txt SC 13G 5827
  Complete submission text file 0000906304-15-000017.txt   7541
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Subject) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: SC 13G | Act: 34 | File No.: 005-39482 | Film No.: 15503451
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 745 FIFTH AVENUE NEW YORK NY 10151
Business Address 745 FIFTH AVENUE NEW YORK NY 10151 212-508-4500
ROYCE & ASSOCIATES LLC (Filed by) CIK: 0000906304 (see all company filings)

EIN.: 522343049 | State of Incorp.: DE | Fiscal Year End: 0331
Type: SC 13G