Form S-3 - Registration statement under Securities Act of 1933:
SEC Accession No. 0000720500-11-000005
Filing Date
2011-08-12
Accepted
2011-08-12 16:01:01
Documents
5

Document Format Files

Seq Description Document Type Size
1 FORM S-3 registrationstatementunder.htm S-3 183908
2 OPINION OF COUNSEL REGARDING LEGALITY OF SECURITIES opinionofcounselregardingl.htm EX-5.1 10092
3 CONSENT OF MAYER HOFFMAN MCCANN P.C. consentofmayerhoffmanmccan.htm EX-23.2 4157
4 POWER OF ATTORNEY powerofattorney.htm EX-24.1 15894
5 amtechlogo.jpg GRAPHIC 5333
  Complete submission text file 0000720500-11-000005.txt   222555
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: S-3 | Act: 33 | File No.: 333-176269 | Film No.: 111031358
SIC: 3559 Special Industry Machinery, NEC