Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-25-105161
Filing Date
2025-08-07
Accepted
2025-08-07 16:46:04
Documents
91
Period of Report
2025-06-28

Document Format Files

Seq Description Document Type Size
1 10-Q onto-20250628.htm   iXBRL 10-Q 2675890
2 EX-31.1 onto-ex31_1.htm EX-31.1 20439
3 EX-31.2 onto-ex31_2.htm EX-31.2 20506
4 EX-32.1 onto-ex32_1.htm EX-32.1 11827
5 EX-32.2 onto-ex32_2.htm EX-32.2 12383
  Complete submission text file 0000950170-25-105161.txt   11889851

Data Files

Seq Description Document Type Size
6 XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT onto-20250628.xsd EX-101.SCH 1030611
94 EXTRACTED XBRL INSTANCE DOCUMENT onto-20250628_htm.xml XML 2988186
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 251194942
SIC: 3829 Measuring & Controlling Devices, NEC
(CF Office: 08 Industrial Applications and Services)