Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0000950170-25-052319
Filing Date
2025-04-09
Accepted
2025-04-09 08:54:36
Documents
29
Period of Report
2025-05-21

Document Format Files

Seq Description Document Type Size
1 DEF 14A onto-20250408.htm   iXBRL DEF 14A 1558304
2 GRAPHIC img169809760_0.jpg GRAPHIC 11127
3 GRAPHIC img169809760_1.jpg GRAPHIC 63266
4 GRAPHIC img169809760_2.jpg GRAPHIC 63266
5 GRAPHIC img169809760_3.jpg GRAPHIC 356873
6 GRAPHIC img169809760_4.jpg GRAPHIC 133008
7 GRAPHIC img169809760_5.jpg GRAPHIC 41281
8 GRAPHIC img169809760_6.jpg GRAPHIC 27854
9 GRAPHIC img169809760_7.jpg GRAPHIC 22709
10 GRAPHIC img169809760_8.jpg GRAPHIC 73617
11 GRAPHIC img169809760_9.jpg GRAPHIC 2407924
12 GRAPHIC img169809760_10.jpg GRAPHIC 41873
13 GRAPHIC img169809760_11.jpg GRAPHIC 129604
14 GRAPHIC img169809760_12.jpg GRAPHIC 159743
15 GRAPHIC img169809760_13.jpg GRAPHIC 600241
16 GRAPHIC img169809760_14.jpg GRAPHIC 564959
17 GRAPHIC img169809760_15.jpg GRAPHIC 558980
18 GRAPHIC img169809760_16.jpg GRAPHIC 716144
19 GRAPHIC img169809760_17.jpg GRAPHIC 179630
  Complete submission text file 0000950170-25-052319.txt   18626001

Data Files

Seq Description Document Type Size
20 XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT onto-20250408.xsd EX-101.SCH 38439
31 EXTRACTED XBRL INSTANCE DOCUMENT onto-20250408_htm.xml XML 556959
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: DEF 14A | Act: 34 | File No.: 001-39110 | Film No.: 25823933
SIC: 3829 Measuring & Controlling Devices, NEC
(CF Office: 08 Industrial Applications and Services)