Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-017969
Filing Date
2023-05-04
Accepted
2023-05-04 17:14:38
Documents
86
Period of Report
2023-04-01

Document Format Files

Seq Description Document Type Size
1 10-Q onto-20230401.htm   iXBRL 10-Q 2525848
2 EX-31.1 onto-ex31_1.htm EX-31 24657
3 EX-31.2 onto-ex31_2.htm EX-31 24702
4 EX-32.1 onto-ex32_1.htm EX-32 14302
5 EX-32.2 onto-ex32_2.htm EX-32 14922
  Complete submission text file 0000950170-23-017969.txt   10353772

Data Files

Seq Description Document Type Size
6 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT onto-20230401_pre.xml EX-101.PRE 281047
7 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT onto-20230401_def.xml EX-101.DEF 118291
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT onto-20230401.xsd EX-101.SCH 49854
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT onto-20230401_cal.xml EX-101.CAL 64112
10 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT onto-20230401_lab.xml EX-101.LAB 380787
80 EXTRACTED XBRL INSTANCE DOCUMENT onto-20230401_htm.xml XML 2560619
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 23889960
SIC: 3829 Measuring & Controlling Devices, NEC