Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-062243
Filing Date
2023-11-13
Accepted
2023-11-09 17:36:35
Documents
88
Period of Report
2023-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q onto-20230930.htm   iXBRL 10-Q 2862526
2 EX-31.1 onto-ex31_1.htm EX-31.1 21797
3 EX-31.2 onto-ex31_2.htm EX-31.2 21860
4 EX-32.1 onto-ex32_1.htm EX-32.1 12583
5 EX-32.2 onto-ex32_2.htm EX-32.2 13117
  Complete submission text file 0000950170-23-062243.txt   11110480

Data Files

Seq Description Document Type Size
6 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT onto-20230930_cal.xml EX-101.CAL 62729
7 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT onto-20230930_pre.xml EX-101.PRE 284751
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT onto-20230930.xsd EX-101.SCH 50820
9 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT onto-20230930_lab.xml EX-101.LAB 385720
10 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT onto-20230930_def.xml EX-101.DEF 119708
82 EXTRACTED XBRL INSTANCE DOCUMENT onto-20230930_htm.xml XML 2698332
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 231393978
SIC: 3829 Measuring & Controlling Devices, NEC