Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0000315066-02-000435
Filing Date
2002-02-13
Accepted
2002-02-13 00:00:00
Documents
1

Document Format Files

Seq Description Document Type Size
1 DOC ONE filing.txt SC 13G 12559
  Complete submission text file 0000315066-02-000435.txt   14487
Mailing Address 82 DEVONSHIRE STREET BOSTON MA 02109
Business Address 82 DEVONSHIRE ST BOSTON MA 02109 6175706339
FMR CORP (Filed by) CIK: 0000315066 (see all company filings)

EIN.: 161144965 | State of Incorp.: MA | Fiscal Year End: 1231
SIC: 0000

Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Subject) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: SC 13G | Act: 34 | File No.: 005-60443 | Film No.: 02540856
SIC: 3559 Special Industry Machinery, NEC