Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0001193125-09-028545
Filing Date
2009-02-13
Accepted
2009-02-13 11:17:31
Documents
1

Document Format Files

Seq Description Document Type Size
1 SCHEDULE 13G dsc13g.htm SC 13G 75411
  Complete submission text file 0001193125-09-028545.txt   77364
Mailing Address
Business Address 125 HIGH STREET SOUTH BOSTON MA 02110 6174824870
ESSEX INVESTMENT MANAGEMENT CO LLC (Filed by) CIK: 0000201772 (see all company filings)

EIN.: 004260191 | State of Incorp.: MA | Fiscal Year End: 1130
Type: SC 13G

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Subject) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: SC 13G | Act: 34 | File No.: 005-39482 | Film No.: 09599492
SIC: 3559 Special Industry Machinery, NEC