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Filing Detail
Form ARS - Annual Report to Security Holders:
SEC Accession No. 9999999997-02-017186
Filing Date
2002-03-20
Accepted
2002-03-20 00:00:00
Documents
1
Period of Report
2001-12-31

Document Format Files

Seq Description Document Type Size
1 AUTO-GENERATED PAPER DOCUMENT 9999999997-02-017186.paper ARS 150
  Scanned paper document scanned.pdf   3403024
  Complete submission text file 9999999997-02-017186.txt   1630
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: ARS | Act: 34 | File No.: 000-30941 | Film No.: 02024969
SIC: 3559 Special Industry Machinery, NEC