Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-25-010325
Filing Date
2025-08-05
Accepted
2025-08-05 17:19:01
Documents
79
Period of Report
2025-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20250630x10q.htm   iXBRL 10-Q 2070021
2 EX-31.1 acls-20250630xex31d1.htm EX-31.1 12517
3 EX-31.2 acls-20250630xex31d2.htm EX-31.2 12952
4 EX-32.1 acls-20250630xex32d1.htm EX-32.1 6741
5 EX-32.2 acls-20250630xex32d2.htm EX-32.2 6758
  Complete submission text file 0001558370-25-010325.txt   8357699

Data Files

Seq Description Document Type Size
6 EX-101.SCH acls-20250630.xsd EX-101.SCH 45499
7 EX-101.CAL acls-20250630_cal.xml EX-101.CAL 82411
8 EX-101.DEF acls-20250630_def.xml EX-101.DEF 163869
9 EX-101.LAB acls-20250630_lab.xml EX-101.LAB 432681
10 EX-101.PRE acls-20250630_pre.xml EX-101.PRE 309157
82 EXTRACTED XBRL INSTANCE DOCUMENT acls-20250630x10q_htm.xml XML 1559466
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 251186208
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)