Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-25-006534
Filing Date
2025-05-06
Accepted
2025-05-06 17:17:35
Documents
79
Period of Report
2025-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20250331x10q.htm   iXBRL 10-Q 1529000
2 EX-31.1 acls-20250331xex31d1.htm EX-31.1 12515
3 EX-31.2 acls-20250331xex31d2.htm EX-31.2 12950
4 EX-32.1 acls-20250331xex32d1.htm EX-32.1 6739
5 EX-32.2 acls-20250331xex32d2.htm EX-32.2 6756
  Complete submission text file 0001558370-25-006534.txt   7038751

Data Files

Seq Description Document Type Size
6 EX-101.SCH acls-20250331.xsd EX-101.SCH 44964
7 EX-101.CAL acls-20250331_cal.xml EX-101.CAL 78464
8 EX-101.DEF acls-20250331_def.xml EX-101.DEF 160236
9 EX-101.LAB acls-20250331_lab.xml EX-101.LAB 412228
10 EX-101.PRE acls-20250331_pre.xml EX-101.PRE 300101
82 EXTRACTED XBRL INSTANCE DOCUMENT acls-20250331x10q_htm.xml XML 1238474
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 25918340
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)