Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001558370-25-001855
Filing Date
2025-02-28
Accepted
2025-02-27 19:30:17
Documents
112
Period of Report
2024-12-31

Document Format Files

Seq Description Document Type Size
1 10-K acls-20241231x10k.htm   iXBRL 10-K 2753382
2 EX-10.1 acls-20241231xex10d1.htm EX-10.1 62616
3 EX-10.8 acls-20241231xex10d8.htm EX-10.8 24107
4 EX-10.9 acls-20241231xex10d9.htm EX-10.9 13898
5 EX-21.1 acls-20241231xex21d1.htm EX-21.1 6990
6 EX-23.1 acls-20241231xex23d1.htm EX-23.1 6494
7 EX-31.1 acls-20241231xex31d1.htm EX-31.1 13133
8 EX-31.2 acls-20241231xex31d2.htm EX-31.2 14158
9 EX-32.1 acls-20241231xex32d1.htm EX-32.1 6114
10 EX-32.2 acls-20241231xex32d2.htm EX-32.2 7446
  Complete submission text file 0001558370-25-001855.txt   12400601

Data Files

Seq Description Document Type Size
11 EX-101.SCH acls-20241231.xsd EX-101.SCH 71701
12 EX-101.CAL acls-20241231_cal.xml EX-101.CAL 109963
13 EX-101.DEF acls-20241231_def.xml EX-101.DEF 251893
14 EX-101.LAB acls-20241231_lab.xml EX-101.LAB 655612
15 EX-101.PRE acls-20241231_pre.xml EX-101.PRE 496984
115 EXTRACTED XBRL INSTANCE DOCUMENT acls-20241231x10k_htm.xml XML 2530030
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 25681813
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)