Form 10-K/A - Annual report [Section 13 and 15(d), not S-K Item 405]: [Amend]
SEC Accession No. 0001558370-24-001969
Filing Date
2024-02-28
Accepted
2024-02-28 15:01:02
Documents
101
Period of Report
2023-12-31

Document Format Files

Seq Description Document Type Size
1 10-K/A acls-20231231x10ka.htm   iXBRL 10-K/A 2038579
2 EX-23.1 acls-20231231xex23d1.htm EX-23.1 6622
3 EX-31.1 acls-20231231xex31d1.htm EX-31.1 13252
4 EX-31.2 acls-20231231xex31d2.htm EX-31.2 14268
5 EX-32.1 acls-20231231xex32d1.htm EX-32.1 6233
6 EX-32.2 acls-20231231xex32d2.htm EX-32.2 7558
  Complete submission text file 0001558370-24-001969.txt   11282804

Data Files

Seq Description Document Type Size
7 EX-101.SCH acls-20231231.xsd EX-101.SCH 68548
8 EX-101.CAL acls-20231231_cal.xml EX-101.CAL 105523
9 EX-101.DEF acls-20231231_def.xml EX-101.DEF 249912
10 EX-101.LAB acls-20231231_lab.xml EX-101.LAB 681081
11 EX-101.PRE acls-20231231_pre.xml EX-101.PRE 486388
103 EXTRACTED XBRL INSTANCE DOCUMENT acls-20231231x10ka_htm.xml XML 2552173
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K/A | Act: 34 | File No.: 000-30941 | Film No.: 24694250
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)