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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-23-013134
Filing Date
2023-08-03
Accepted
2023-08-03 13:09:11
Documents
70
Period of Report
2023-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20230630x10q.htm   iXBRL 10-Q 1947279
2 EX-31.1 acls-20230630xex31d1.htm EX-31.1 12618
3 EX-31.2 acls-20230630xex31d2.htm EX-31.2 13053
4 EX-32.1 acls-20230630xex32d1.htm EX-32.1 6842
5 EX-32.2 acls-20230630xex32d2.htm EX-32.2 6064
  Complete submission text file 0001558370-23-013134.txt   7305802

Data Files

Seq Description Document Type Size
6 EX-101.SCH acls-20230630.xsd EX-101.SCH 41248
7 EX-101.CAL acls-20230630_cal.xml EX-101.CAL 70505
8 EX-101.DEF acls-20230630_def.xml EX-101.DEF 151859
9 EX-101.LAB acls-20230630_lab.xml EX-101.LAB 388887
10 EX-101.PRE acls-20230630_pre.xml EX-101.PRE 278412
64 EXTRACTED XBRL INSTANCE DOCUMENT acls-20230630x10q_htm.xml XML 1334400
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 231139073
SIC: 3559 Special Industry Machinery, NEC