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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001558370-23-002006
Filing Date
2023-02-24
Accepted
2023-02-24 12:44:49
Documents
99
Period of Report
2022-12-31

Document Format Files

Seq Description Document Type Size
1 10-K acls-20221231x10k.htm   iXBRL 10-K 2745664
2 EX-10.8 acls-20221231xex10d8.htm EX-10.8 18019
3 EX-10.9 acls-20221231xex10d9.htm EX-10.9 13612
4 EX-10.15 acls-20221231xex10d15.htm EX-10.15 32471
5 EX-21.1 acls-20221231xex21d1.htm EX-21.1 7091
6 EX-23.1 acls-20221231xex23d1.htm EX-23.1 6616
7 EX-31.1 acls-20221231xex31d1.htm EX-31.1 13228
8 EX-31.2 acls-20221231xex31d2.htm EX-31.2 14259
9 EX-32.1 acls-20221231xex32d1.htm EX-32.1 5380
10 EX-32.2 acls-20221231xex32d2.htm EX-32.2 7547
  Complete submission text file 0001558370-23-002006.txt   12106941

Data Files

Seq Description Document Type Size
11 EX-101.SCH acls-20221231.xsd EX-101.SCH 68655
12 EX-101.CAL acls-20221231_cal.xml EX-101.CAL 93191
13 EX-101.DEF acls-20221231_def.xml EX-101.DEF 249673
14 EX-101.LAB acls-20221231_lab.xml EX-101.LAB 696861
15 EX-101.PRE acls-20221231_pre.xml EX-101.PRE 484105
93 EXTRACTED XBRL INSTANCE DOCUMENT acls-20221231x10k_htm.xml XML 2568588
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 23665144
SIC: 3559 Special Industry Machinery, NEC