Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-20-009324
Filing Date
2020-08-05
Accepted
2020-08-05 12:40:07
Documents
73
Period of Report
2020-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20200630x10q.htm   iXBRL 10-Q 1959436
2 EX-31.1 acls-20200630xex31d1.htm EX-31.1 12592
3 EX-31.2 acls-20200630xex31d2.htm EX-31.2 13033
4 EX-32.1 acls-20200630xex32d1.htm EX-32.1 6818
5 EX-32.2 acls-20200630xex32d2.htm EX-32.2 6044
  Complete submission text file 0001558370-20-009324.txt   6976600

Data Files

Seq Description Document Type Size
6 EX-101.SCH acls-20200630.xsd EX-101.SCH 40053
7 EX-101.CAL acls-20200630_cal.xml EX-101.CAL 68282
8 EX-101.DEF acls-20200630_def.xml EX-101.DEF 123424
9 EX-101.LAB acls-20200630_lab.xml EX-101.LAB 401779
10 EX-101.PRE acls-20200630_pre.xml EX-101.PRE 280297
11 EXTRACTED XBRL INSTANCE DOCUMENT acls-20200630x10q_htm.xml XML 1353847
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 201076518
SIC: 3559 Special Industry Machinery, NEC