Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001415889-25-013644
Filing Date
2025-05-19
Accepted
2025-05-19 16:30:24
Documents
2
Period of Report
2025-05-15

Document Format Files

Seq Description Document Type Size
1 form4-05192025_040520.html 4  
1 form4-05192025_040520.xml 4 10932
2 ex24-05192025_040520.htm EX-24 4819
  Complete submission text file 0001415889-25-013644.txt   17223
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address
Low Russell (Reporting) CIK: 0001689237 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-30941 | Film No.: 25964444