Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001209191-15-042164
Filing Date
2015-05-13
Accepted
2015-05-13 14:26:33
Documents
2
Period of Report
2015-05-13

Document Format Files

Seq Description Document Type Size
1 FORM 3 SUBMISSION doc3.html 3  
1 FORM 3 SUBMISSION doc3.xml 3 2155
2 EX-24.1 DOCUMENT attachment1.htm EX-24.1 2387
  Complete submission text file 0001209191-15-042164.txt   5996
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address C/O FORMFACTOR, INC. 7005 SOUTHFRONT ROAD LIVERMORE CA 94551
Business Address
St Dennis Thomas (Reporting) CIK: 0001339595 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 15857752