Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-13-058894
Filing Date
2013-11-14
Accepted
2013-11-14 08:40:45
Documents
2
Period of Report
2013-11-13

Document Format Files

Seq Description Document Type Size
1 LAWSON FORM 3 rrd392146.html 3  
1 LAWSON FORM 3 rrd392146.xml 3 9201
2 POWER OF ATTORNEY BY DOUGLAS A. LAWSON DATED OCTOBER 4, 2013 rrd352822_399601.htm EX-24.1 2493
  Complete submission text file 0001181431-13-058894.txt   13116
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 21 VILLAGE VIEW ROAD WESTFORD MA 01886
Business Address
Lawson Douglas A. (Reporting) CIK: 0001420601 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 131216924