Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-13-009223
Filing Date
2013-02-13
Accepted
2013-02-13 17:12:44
Documents
2
Period of Report
2013-02-13

Document Format Files

Seq Description Document Type Size
1 ALDEBORGH FORM 3 rrd367348.html 3  
1 ALDEBORGH FORM 3 rrd367348.xml 3 3408
2 POWER OF ATTORNEY BY JOHN E. ALDEBORGH DATED JANUARY 16, 2013 rrd329870_372854.htm EX-99.1 2512
  Complete submission text file 0001181431-13-009223.txt   7244
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address
Business Address
ALDEBORGH JOHN E (Reporting) CIK: 0001192438 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 13604409