Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001181431-12-017963
Filing Date
2012-03-16
Accepted
2012-03-16 14:50:24
Documents
1
Period of Report
2012-03-15

Document Format Files

Seq Description Document Type Size
1 FALLON 2012 RSU GRANT rrd339081.html 4  
1 FALLON 2012 RSU GRANT rrd339081.xml 4 3663
  Complete submission text file 0001181431-12-017963.txt   4993
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address
Business Address
FALLON LYNNETTE C (Reporting) CIK: 0001195654 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-30941 | Film No.: 12697264