Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-11-006914
Filing Date
2011-02-03
Accepted
2011-02-03 08:52:33
Documents
2
Period of Report
2011-02-02

Document Format Files

Seq Description Document Type Size
1 BRAUN FORM 3 rrd298706.html 3  
1 BRAUN FORM 3 rrd298706.xml 3 1617
2 POWER OF ATTORNEY BY EDWARD H. BRAUN DATED FEBRUARY 2, 2011 rrd267738_302181.htm EX-24.1 2488
  Complete submission text file 0001181431-11-006914.txt   5835
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address
Business Address
BRAUN EDWARD H (Reporting) CIK: 0001241689 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 11568577