Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-11-003876
Filing Date
2011-01-18
Accepted
2011-01-18 10:55:04
Documents
1
Period of Report
2011-01-15

Document Format Files

Seq Description Document Type Size
1 rrd297222.html 3  
1 rrd297222.xml 3 1635
  Complete submission text file 0001181431-11-003876.txt   3477
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address
ZAGER JAY (Reporting) CIK: 0001182723 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 11532200