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Filing Detail
Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001181431-05-038164
Filing Date
2005-07-05
Accepted
2005-07-05 10:38:32
Documents
1
Period of Report
2005-06-30

Document Format Files

Seq Description Document Type Size
1 FALLON FORM 4 -RSU GRANT rrd82661.html 4  
1 FALLON FORM 4 -RSU GRANT rrd82661.xml 4 4948
  Complete submission text file 0001181431-05-038164.txt   6838
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address
Business Address AXCELIS TECHNOLOGIES INC 108 CHERRY HILL DRIVE BEVERLY MA 01915-1053
FALLON LYNNETTE C (Reporting) CIK: 0001195654 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-30941 | Film No.: 05934952