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Filing Detail
Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-05-030017
Filing Date
2005-05-24
Accepted
2005-05-24 09:07:06
Documents
2
Period of Report
2005-05-23

Document Format Files

Seq Description Document Type Size
1 NARUTO FORM 3 rrd79764.html 3  
1 NARUTO FORM 3 rrd79764.xml 3 1601
2 POWER OF ATTORNEY DATED MAY 20, 2005 rrd68138_76728.htm EX-24. 3418
  Complete submission text file 0001181431-05-030017.txt   6801
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 978-787-4000
Naruto Michio (Reporting) CIK: 0001328083 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 05853046