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Filing Detail
Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-05-029217
Filing Date
2005-05-19
Accepted
2005-05-19 15:36:11
Documents
2
Period of Report
2005-05-12

Document Format Files

Seq Description Document Type Size
1 rrd78994.html 3  
1 rrd78994.xml 3 16650
2 POWER OF ATTORNEY DATED MAY 12, 2005 rrd67428_76606.htm EX-99. 2491
  Complete submission text file 0001181431-05-029217.txt   20895
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 978-787-4000
Namaroff Mark J (Reporting) CIK: 0001327115 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 05844819